Advanced Imaging


Advanced Imaging Magazine

Updated: July 8th, 2008 05:26 PM CDT

Laser Scanning, Inspection Microscopes


The LEXT is a confocal laser scanning microscope for surface analysis. No preparation is required, and samples are placed directly on the microscope stage. Both observation and high-precision measurements are possible in real-time 3-D. Resolution is 0.12 micrometer (XY) and 0.01 micrometer (Z). The MX61 is a semiconductor inspection microscope for 200- and 300-millimeter wafers. It improves process inspection by increasing the failure detection rate, according to the company. Automatic contrast optimization and an intuitive interface minimize errors and reduce the variation of results between operators. OLYMPUS LIFE AND MATERIAL SCIENCE EUROPA. Hamburg, Germany.

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